Electron Probe Microanalysis of Thin Films and Multilayers Using the Computer Program XFILM-Reference-Cited by-同舟云学术

Electron Probe Microanalysis of Thin Films and Multilayers Using the Computer Program XFILM

Published:2009-12-24 Issue:1 Volume:16 Page:21-32
ISSN:1431-9276
Container-title:Microscopy and Microanalysis
language:en
Short-container-title:Microsc Microanal

Author:

Llovet Xavier,Merlet Claude

Abstract

AbstractXFILM is a computer program for determining the thickness and composition of thin films on substrates and multilayers by electron probe microanalysis. In this study, we describe the X-ray emission model implemented in the latest version of XFILM and assess its reliability by comparing measured and calculated k-ratios from thin-film samples available in the literature. We present and discuss examples of applications of XFILM that illustrate the capabilities of the program.

Publisher

Cambridge University Press (CUP)

Subject

Instrumentation

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