A Simple and Accurate Approach for Thickness Measurement of Particles and Thin Films Using SEM-EDS
Author:
Affiliation:
1. Univ Paris Est Creteil and Université Paris Cité, UMR CNRS 7583, Laboratoire Interuniversitaire des Systèmes Atmosphériques , Paris , France
Publisher
Oxford University Press (OUP)
Link
https://academic.oup.com/mam/article-pdf/30/Supplement_1/ozae044.082/58671501/ozae044.082.pdf
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1. Characterization of the Chemical Composition of Uranium Microparticles with Irregular Shapes Using Standardless Electron Probe Microanalysis and Micro-Raman Spectrometry
2. Electron Probe Measurements of Evaporated Metal Films
3. A method for determining the mass thickness of thin films using electron probe microanalysis
4. Depth profiling of P shallow implants in silicon by electron-induced X-ray emission spectroscopy
5. Standardless determination of nanometric thicknesses in stratified samples by electron probe microanalysis
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