TEM Study of AlN/Oxides (SiOx or AlxOy) Nanocomposite Films Prepared by a Differential Pumping Co-Sputtering System-Reference-Cited by-同舟云学术

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TEM Study of AlN/Oxides (SiOx or AlxOy) Nanocomposite Films Prepared by a Differential Pumping Co-Sputtering System

Published:2012-07 Issue:S2 Volume:18 Page:1696-1697
ISSN:1431-9276
Container-title:Microscopy and Microanalysis
language:en
Short-container-title:Microsc Microanal

Author:

Nose M.,Chiou W.,Takabatake H.,Satho T.,Kawabata T.,Matsuda K.

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Publisher

Cambridge University Press (CUP)

Subject

Instrumentation

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Structural Investigation of AlN/SiOx Nanocomposite Hard Coatings Fabricated by Differential Pumping Cosputtering;Microscopy and Microanalysis;2016-04-12

2. Structure of multilayered Cr(Al)N/SiOx nanocomposite coatings fabricated by differential pumping co-sputtering;Applied Physics Letters;2013-11-11

3. Structural Investigation of Cr(Al)N/SiOx Films Prepared on Si Substrates by Differential Pumping Cosputtering;ACS Applied Materials & Interfaces;2013-04-29

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