Structure of multilayered Cr(Al)N/SiOx nanocomposite coatings fabricated by differential pumping co-sputtering
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4831736
Reference15 articles.
1. Concept for the Design of Superhard Nanocomposites with High Thermal Stability: Their Preparation, Properties, and Industrial Applications
2. Structure and properties of selected (Cr–Al–N, TiC–C, Cr–B–N) nanostructured tribological coatings
3. Magnetron sputtering of hard Cr–Al–N–O thin films
4. Microstructure, mechanical properties, and high-temperature oxidation resistance of AlN/SiO2 nanomultilayer coatings
5. Deposition of novel nanocomposite films by a newly developed differential pumping co-sputtering system
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Preparation of Cr–Si–N–O thin films epitaxially grown on MgO substrates by pulsed laser deposition;Vacuum;2020-09
2. Structural Investigation of AlN/SiOx Nanocomposite Hard Coatings Fabricated by Differential Pumping Cosputtering;Microscopy and Microanalysis;2016-04-12
3. Cr(Al)N/Al2O3 Superhard Coatings Prepared by Differential Pumping Cosputtering: Structure and Mechanical Properties;Metallography, Microstructure, and Analysis;2015-10-07
4. Cr(Al)N/Al2O3 nanocomposite coatings fabricated by differential pumping cosputtering;Microscopy and Microanalysis;2015-08
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