Deposition of novel nanocomposite films by a newly developed differential pumping co-sputtering system-Reference-Cited by-同舟云学术

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Deposition of novel nanocomposite films by a newly developed differential pumping co-sputtering system

Published:2012-01 Issue:1 Volume:30 Page:011502
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Nose Masateru,Kurimoto Takeshi,Saiki Atsushi,Matsuda Kenji,Terayama Kiyoshi

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.3659704

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Tunnel magnetodielectric effect: Theory and experiment;Applied Physics Letters;2022-02-21

2. Structural Investigation of AlN/SiOx Nanocomposite Hard Coatings Fabricated by Differential Pumping Cosputtering;Microscopy and Microanalysis;2016-04-12

3. Structure, magnetic and dielectric properties of BaTiO 3 –Co multi-layer nano-composite films;Journal of Magnetism and Magnetic Materials;2016-03

4. Cr(Al)N/Al2O3 Superhard Coatings Prepared by Differential Pumping Cosputtering: Structure and Mechanical Properties;Metallography, Microstructure, and Analysis;2015-10-07

5. Cr(Al)N/Al2O3 nanocomposite coatings fabricated by differential pumping cosputtering;Microscopy and Microanalysis;2015-08

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