Structural Investigation of Cr(Al)N/SiOx Films Prepared on Si Substrates by Differential Pumping Cosputtering-Reference-Cited by-同舟云学术

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Structural Investigation of Cr(Al)N/SiOx Films Prepared on Si Substrates by Differential Pumping Cosputtering

Published:2013-04-29 Issue:9 Volume:5 Page:3833-3838
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Kawasaki Masahiro¹,Takabatake Hiroshi²,Onishi Ichiro³,Nose Masateru⁴,Shiojiri Makoto⁵

Affiliation:

1. JEOL USA Inc., 11 Dearborn Road, Peabody, Massachusetts 01960, United States

2. School of Science and Engineering, University of Toyama, Toyama 930-8555, Japan

3. JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan

4. Faculty of Art and Design, University of Toyama, Takaoka 933-8588, Japan

5. Kyoto Institute of Technology, Kyoto 606-8585, Japan

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/am400477f

Reference20 articles.

1. Nanostructured materials for solar energy conversion

2. Plasma deposition of optical films and coatings: A review

3. Structural and optical properties of Cu:silica nanocomposite films prepared by co-sputtering deposition

4. Electrical properties of TaN–Cu nanocomposite thin films

5. Tunnel-type GMR in CoAlO insulated granular system — Its oxygen-concentration dependence

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1. Tunnel magnetodielectric effect: Theory and experiment;Applied Physics Letters;2022-02-21

2. Thermal failure mechanism of multilayer brittle TiN/CrAlN films;Ceramics International;2018-05

3. Structural Investigation of AlN/SiOx Nanocomposite Hard Coatings Fabricated by Differential Pumping Cosputtering;Microscopy and Microanalysis;2016-04-12

4. Cr(Al)N/Al2O3 Superhard Coatings Prepared by Differential Pumping Cosputtering: Structure and Mechanical Properties;Metallography, Microstructure, and Analysis;2015-10-07

5. Substrate effect on wear resistant transition metal nitride hard coatings: Microstructure and tribo-mechanical properties;Ceramics International;2015-09

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