Error Quantification in Strain Mapping Methods
-
Published:2007-05-16
Issue:5
Volume:13
Page:320-328
-
ISSN:1431-9276
-
Container-title:Microscopy and Microanalysis
-
language:en
-
Short-container-title:Microsc Microanal
Author:
Guerrero Elisa,Galindo Pedro,Yáñez Andrés,Ben Teresa,Molina Sergio I.
Abstract
In this article a method for determining errors of the strain values when applying strain mapping techniques has been devised. This methodology starts with the generation of a thickness/defocus series of simulated high-resolution transmission electron microscopy images of InAsxP1−x/InP heterostructures and the application of geometric phase. To obtain optimal defocusing conditions, a comparison of different defocus values is carried out by the calculation of the strain profile standard deviations among different specimen thicknesses. Finally, based on the analogy of real state strain to a step response, a characterization of strain mapping error near an interface is proposed.
Publisher
Cambridge University Press (CUP)
Reference18 articles.
1. Seitz, H. , Ahlborn, K. , Seibt, M. & Schroter, W. (1998).Determination of elastic strains in epitaxial layers by HREM.J Microsc 190,184–189. 2. Bierwolf, R. , Hohenstein, M. , Phillip, F. , Brandt, O. , Crook, G.E. & Ploog, K. (1993).Direct measurement of local lattice distortions in strained layer structures by HREM.Ultramicroscopy 49,273–285. 3. Kret, S. , Cywiński, G. , Wojtowicz, T. , Kossut, J. , Delamarre, C. , Laval, J.Y. , Dubon, A. & Chiffmacher, G.S. (1999).Determination of Mn concentration profile in Cd x Mn1−x Te quantum wells with trapezoid confined potential by HRTEM. InProceedings of the X Conference on Electron Microscopy of Solids, Warsaw-Serock, Poland, E. Jezierska & J.A. Kozobowski (Eds.), pp.167–170.Krakow, Poland:Fotobit. 4. Robertson, M.D. , Corbett, J.M. , Webb, J.B. , Jagger, J. & Currie, J.E. (1995).Elastic strain determination in semiconductor epitaxial layers by HREM.Micron 26,521. 5. Bayle, P. , Deutsch, T. , Pilles, B. , Lancon, F. , Marty, A. & Thibault, J. (1994).Quantitative analysis of the deformation and chemical profiles of strained multilayers.Ultramicroscopy 56,94.
Cited by
20 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
|
|