Development of an SI Traceable Measurement Method for the Number Concentration of Liquid-borne Particles-Reference-Cited by-同舟云学术

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Development of an SI Traceable Measurement Method for the Number Concentration of Liquid-borne Particles

Published:2023-07-10 Issue:7 Volume:60 Page:414-421
ISSN:0386-6157
Container-title:Journal of the Society of Powder Technology, Japan
language:en
Short-container-title:Funtai Kogakkaishi

Author:

Kuruma Yuki¹,Sakaguchi Takayuki¹,Sakurai Hiromu¹

Affiliation:

1. National Institute of Advanced Industrial Science and Technology, National Metrology Institute of Japan

Publisher

The Society of Powder Technology, Japan

Subject

Filtration and Separation,Fluid Flow and Transfer Processes,Process Chemistry and Technology,Catalysis

Link

https://www.jstage.jst.go.jp/article/sptj/60/7/60_60.414/_pdf

Reference30 articles.

1. [1] International Roadmap for Devices and Systems (IRDS), Yield Enhancement (2017).

2. [2] A. Rastegar, M. Samayoa, M. House, H. Kurtuldu, S.-K. Eah, L. Morse, J. Harris-Jones, Particle control challenges in process chemicals and ultra-pure water for sub-10 nm technology nodes, Proc. SPIE, Extreme Ultraviolet (EUV) Lithography V 9048 (2014) 90480P.

3. [3] S. Liu, B. Liu, Particle measurement with a liquid-borne particle counter: Analytical figures of merit, Solid State Phenom. 219 (2015) 157–160.

4. [4] International Council for Standardization in Haematology (ICSH), Reference method for the enumeration of erythrocytes and leucocytes, Clin. Lab. Haematol. 16 (1994) 131–138.

5. [5] ICSH and International Society of Laboratory Hematology (ISLH), Platelet Counting by the RBC/Platelet ratio method a reference method, Am. J. Clin. Pathol. 115 (2001) 460–464.

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