Affiliation:
1. ChemTrace Analytical Services
Abstract
Particle contamination is one of the major concerns in semiconductor industry as it can reduce device yield, device quality and device reliability [1]. Liquid-borne particle counters (particle counters) are widely used to measure particle levels in water, chemicals, and other process liquids. In conjunction with sonication in ultrapure water and/or other liquids, these counters are also used to measure particle levels on surfaces of wafers and/or chamber parts to determine the cleanliness of wafer/part surface and to evaluate and improve surface cleaning processes. They have become indispensable tools in semiconductor surface cleaning processes [2].
Publisher
Trans Tech Publications, Ltd.
Subject
Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics
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2 articles.
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