Dry Etching of Germanium Using Inductively Coupled Ar/CCl2F2 /Cl2 Plasma-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Dry Etching of Germanium Using Inductively Coupled Ar/CCl2F2 /Cl2 Plasma

Published:2010-03-31 Issue:1 Volume:6 Page:35-39
ISSN:1738-8090
Container-title:Electronic Materials Letters
language:
Short-container-title:Electron. Mater. Lett.

Author:

Kim Taek Sung,Choi Sang-Sik,Shin Mi Im,Jeong Tae Soo,Kang Sukil,Choi Chel-Jong,Shim Kyu-Hwan

Publisher

Springer Science and Business Media LLC

Subject

Electronic, Optical and Magnetic Materials

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Dry Etching of Germanium with Laser Induced Reactive Micro Plasma;Lasers in Manufacturing and Materials Processing;2021-06-16

2. HIGH-RATE HIGH-DENSITY ICP ETCHING OF GERMANIUM;High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes;2019

3. Traceable Nanomechanical Metrology of GaN Micropillar Array;Advanced Engineering Materials;2018-07-23

4. Dry etching and residue removal of functional polymer mixed with TiO2 microparticles via inductively coupled CF4/O2 plasma and ultrasonic-treated acetone for humidity sensor application;RSC Advances;2016

5. Fabrication of PIN photo-diode from p-Ge/i-Ge/n-Si hetero junction structure;Materials Science in Semiconductor Processing;2014-01

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP