1. Astrom, K.J. and Hagglund, T. (1998). Automatic Tuning of PID Controllers. Instrument Society of America.
2. Astrom, K.J. and Panagapoulos, H. (1999).PID Control Design andH∞loop shaping.Proceedings of the 1999 IEEE International Conference on Control Applications.
3. A Framework for Robust Run byRun Control with ot Delayed Measurements;Baras;IEEE Trans.Semiconduct. Manufact.,1997
4. Boyd, S. and Barratt, C. (1991). Linear Controller Design, Limits of Performance.Prentice Hall.
5. Run byRun Control of Chemical-Mechanical Polishing;Boning;IEEETrans. Compon. Pack.Manufact,1996