An alternative method of preparing hydrogen-doped evaporated amorphous silicon preliminary report
Author:
Affiliation:
1. a Institut für Angewandte Physik, TU Clausthal , D-3392 , Clausthal-Zellerfeld, F.R. Germany
Publisher
Informa UK Limited
Subject
General Physics and Astronomy,General Chemical Engineering
Link
https://www.tandfonline.com/doi/pdf/10.1080/01418638108225810
Reference6 articles.
1. Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering
2. The hydrogen content of a-Ge:H and a-Si:H as determined by ir spectroscopy, gas evolution and nuclear reaction techniques
3. Infrared vibrational spectra of rf-sputtered hydrogenated amorphous silicon
4. Optical and electrical properties of evaporated amorphous silicon with hydrogen
5. Some properties of evaporated amorphous silicon made with atomic hydrogen
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