Quantitative Analysis of MEMS Piezoresistive Pressure Sensors Based on Wide Band Gap Materials
Author:
Affiliation:
1. Electronics Division, Bhabha Atomic Research Centre, Mumbai 400085, India
2. Homi Bhabha National Institute, Anushaktinagar, Mumbai 400094, India
Publisher
Informa UK Limited
Subject
Electrical and Electronic Engineering,Computer Science Applications,Theoretical Computer Science
Link
https://www.tandfonline.com/doi/pdf/10.1080/03772063.2019.1620641
Reference38 articles.
1. Review: Semiconductor Piezoresistance for Microsystems
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4. Review on materials, microsensors, systems and devices for high-temperature and harsh-environment applications
5. The Piezoresistive Effect of SiC for MEMS Sensors at High Temperatures: A Review
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