Measurements of Ferroelectric MEMS Microphones-Reference-Cited by-同舟云学术

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Measurements of Ferroelectric MEMS Microphones

Published:2005-01-01 Issue:1 Volume:69 Page:417-429
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Wu Xiaoming¹,Yang Yi¹,Cai Jian¹,Ren Tianling¹,Liu Litian¹

Affiliation:

1. Institute of Microelectronics, Tsinghua University , 100084, Beijing

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580590899441

Reference12 articles.

1. Design considerations in micromachined silicon microphones

2. Silicon microphones - a Danish perspective

3. Piezoelectric microphone with on-chip CMOS circuits

4. A novel ferroelectric based microphone

5. A silicon subminiature microphone based on piezoresistive polysilicon strain gauges

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1. In situ optical control of the synthesis of nanodimensional lead titanate zirconate films in a gas discharge chamber;Nanotechnologies in Russia;2010-06

2. Online in-situ control of lead zirconate titanate film growth in gas discharge chamber;Technical Physics Letters;2010-05

3. Status and prospects of micro- and nanoelectromechanics;Optoelectronics, Instrumentation and Data Processing;2009-06

4. Failure Strains in Micromachined Piezoelectric Membranes;Strain;2009-02

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