Design considerations in micromachined silicon microphones
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference13 articles.
1. A review of silicon microphones;Scheeper;Sensors Actuators A,1994
2. Fabrication of silicon condenser microphones using single wafer technology;Scheeper;J. Microelectromech. Syst.,1992
3. Mechanical analysis of polycrystalline and single-crystalline silicon microstructures;Kovacs;Sensors Actuators A,1994
4. ANSYS Structural Analysis Guide, Release 5.5, 1998, SAS IP Inc., Canonsburg.
5. Finite-element modeling and characterization of a silicon condenser microphone with a highly perforated backplate;Bergqvist;Sensor Actuators A,1993
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