STUDY OF ACOUSTICAL AND OPTICAL PROPERTIES OF ALN FILMS FOR SAW AND BAW DEVICES: CORRELATION BETWEEN THESE PROPERTIES-Reference-Cited by-同舟云学术

STUDY OF ACOUSTICAL AND OPTICAL PROPERTIES OF ALN FILMS FOR SAW AND BAW DEVICES: CORRELATION BETWEEN THESE PROPERTIES

Published:2006-11 Issue:1 Volume:82 Page:45-54
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

ASSOUAR M. B.¹,ELMAZRIA O.¹,EL HAKIKI M.¹,ALNOT P.¹

Affiliation:

1. a Laboratoire de Physique des Milieux Ionisés et Applications , Université de Nancy I , CNRS-UMR 7040, Vandoeuvre lès, 54506, Nancy, France

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580600873016

Reference25 articles.

1. Structural, morphological and acoustic properties of AlN thick films sputtered on Si(001) and Si(111) substrates at low temperature

2. Vibrational properties of AlN grown on (111)-oriented silicon

3. AlN films deposited under various nitrogen concentrations by RF reactive sputtering

4. Fabrication and performance analysis of film bulk acoustic wave resonators

5. Thermoelastic strain and plastic yielding in aluminum nitride on sapphire

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