Comparison of the Ferroelectricity for 70–80 nm Thick Pb(Zr,Ti)O3 Films Deposited on (111)Ir Bottom Electrodes at Different Temperatures by MOCVD-Reference-Cited by-同舟云学术

Comparison of the Ferroelectricity for 70–80 nm Thick Pb(Zr,Ti)O3 Films Deposited on (111)Ir Bottom Electrodes at Different Temperatures by MOCVD

Published:2004-01 Issue:1 Volume:68 Page:147-154
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

NAGAI A.¹,MORIOKA H.¹,ASANO G.¹,SAIKI A.²,FUNAKUBO H.¹

Affiliation:

1. a Department of Innovative and Engineered Materials, Tokyo Institute of Technology , Yokohama, Japan , 226-8502

2. b Department of Material Systems Engineering and Life Science, Toyama University , 3190 Gofuku, Toyama, Japan , 930-8555

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580490895851

Reference22 articles.

1. An experimental 512-bit nonvolatile memory with ferroelectric storage cell

2. Ferroelectric Memories

3. A 0.4-/spl mu/m 3.3-V 1T1C 4-Mb nonvolatile ferroelectric RAM with fixed bitline reference voltage scheme and data protection circuit

4. A 3.3-V, 4-Mb nonvolatile ferroelectric RAM with selectively driven double-pulsed plate read/write-back scheme

5. A 0.5-/spl mu/m, 3-V 1T1C, 1-Mbit FRAM with a variable reference bit-line voltage scheme using a fatigue-free reference capacitor

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1. Comparison of PbZr1−xTixO3 thin films deposited on different substrates by liquid delivery metal organic chemical vapor deposition;Journal of Applied Physics;2009-03-15

2. FABRICATION AND PROPERTIES OF METAL-PZT-METAL CAPACITORS BY LIQUID DELIVERY MOCVD;Integrated Ferroelectrics;2008-12-09

3. Effect of source materials on film thickness and compositional uniformity of MOCVD-P(Zr,Ti)O3 films;Surface and Coatings Technology;2007-09