FABRICATION OF FERROELECTRIC PZT THIN FILMS BY LIQUID DELIVERY MOCVD USING NOVEL Zr and Ti PRECURSORS-Reference-Cited by-同舟云学术

FABRICATION OF FERROELECTRIC PZT THIN FILMS BY LIQUID DELIVERY MOCVD USING NOVEL Zr and Ti PRECURSORS

Published:2008-12-09 Issue:1 Volume:104 Page:16-24
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

YEH C. P.¹,LISKER M.¹,VEZIN V.²,SEITZINGER B.²,BAUMANN P. K.²,GARKE B.³,BLÄSING J.³,KROST A.³,BURTE E. P.¹

Affiliation:

1. a Institute of Micro and Sensor Systems, Otto von Guericke University Magdeburg , Universitätsplatz 2, 39106, Magdeburg, Germany

2. b Aixtron AG Aachen , Kackertstraße 15 – 17, 52072, Aachen

3. c Institute of Experimental Physics , Otto von Guericke University Magdeburg , Universitätsplatz 2, 39106, Magdeburg

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580802554737

Reference18 articles.

1. SmP109: Study on the preparation of PZT ceramic material for medium high frequency saw devices by low vacuum atmosphere sintering

2. Pyroelectric infrared sensor using PZT thin plate on diaphragm as sensitive elements

3. Design of MEMS PZT Circular Diaphragm Actuators to Generate Large Deflections

4. Self-Assembly of PZT Actuators for Micropumps With High Process Repeatability

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Solution-based process with thermal UV treatment for fabrication of piezoelectric PZT films for an actuator array at temperatures under 450 °C;Sensors and Actuators A: Physical;2017-11

2. Fabrication and investigation of three-dimensional ferroelectric capacitors for the application of FeRAM;AIP Advances;2016-03

3. Zirconocene Alkoxides, Promising Precursors for MOCVD of Zirconium Dioxide Thin Films;Chemical Vapor Deposition;2012-05-08