Solution-based process with thermal UV treatment for fabrication of piezoelectric PZT films for an actuator array at temperatures under 450 °C-Reference-Cited by-同舟云学术

Solution-based process with thermal UV treatment for fabrication of piezoelectric PZT films for an actuator array at temperatures under 450 °C

Published:2017-11 Issue: Volume:267 Page:287-292
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Shimura Reijiro,Tue Phan Trong,Tagashira Yuki,Shimoda Tatsuya,Takamura Yuzuru

Funder

JST-CREST

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference24 articles.

1. Ferroelectric thin films: review of materials, properties, and applications;Setter;J. Appl. Phys.,2006

2. Fatigue-free ferroelectric capacitors with platinum electrodes;A-Paz De Araujo;Nature,1995

3. Lanthanum-substituted bismuth titanate for use in non-volatile memories;Park;Nature,1999

4. Fabrication of ferroelectric PZT thin films by liquid delivery MOCVD using novel Zr and Ti precursors;Yeh;Integr. Ferroelectr.,2008

5. Priparation and electrical properties of MOCVD-deposited PZT thin films;Sakashita;J. Appl. Phys.,1991

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