Advanced chemical deposition techniques - from research to production-Reference-Cited by-同舟云学术

Advanced chemical deposition techniques - from research to production

Published:2001-01 Issue:1-4 Volume:36 Page:3-20
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Waser Rainer¹²,Schneller Theo²,Hoffmann-eifert Susanne¹,Ehrhart Peter¹

Affiliation:

1. a IFF, FZJ Research Center Jülich

2. b RWTH Aachen University of Technology Germany

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580108015524

Reference34 articles.

1. Foster , C. M. 1990. Thin Film Ferroelectric Materials and Devices, Edited by: Ramesh , R. 167–197. Boston/Dordrecht/London: Kluwer Academic Publ.

2. CVD engineering for multilayer multicomponent materials: optoelectronics

3. Second generation liquid source misted chemical deposition (LSMCD) technology for ferroelectric thin films

4. Advanced model of metal-organic chemical vapor Deposition of BaxSr1-xTiO3 oxides

Cited by 59 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Vapor Phase Growth of Metal‐Oxide Thin Films and Nanostructures;Tailored Functional Oxide Nanomaterials;2022-03-11

2. Chemical Solution Deposition (CSD);digital Encyclopedia of Applied Physics;2019-02-19

3. Synthesis of 2D Metal Chalcogenide Thin Films through the Process Involving Solution‐Phase Deposition;Advanced Materials;2018-04-24

4. Molecular Precursors for the Phase-Change Material Germanium-Antimony-Telluride, Ge2Sb2Te5(GST);Zeitschrift für anorganische und allgemeine Chemie;2017-08-29

5. Self-Assemblage and Patterning of Thin-Film Ferroic Nanostructures;Nanoscale Ferroelectrics and Multiferroics;2016-03-25