Research on the Gas Pressure Fluctuation Characteristics inside an Aerostatic Thrust Bearing with a Pocketed Orifice-Type Restrictor
Author:
Publisher
Informa UK Limited
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials
Link
http://www.tandfonline.com/doi/pdf/10.1080/10402004.2013.840406
Reference11 articles.
1. A Newly Developed Linear Motor-Driven Aerostatic X-Y Planar Motion Table System for Nano-Machining
2. Incompressible and Analytical Study on Load-Carrying Capacity of a Complex Thrust Gas Bearing
3. Aerostatic and Aerodynamic Performance of an In-Pump Spirally Grooved Thrust Bearing: Analysis and Comparisons to Static Load Experiments
4. Improvement of Machining Accuracy of 5-Axis Control Ultraprecision Machining by Means of Laminarization and Mirror Surface Finishing
5. The effect of the recess shape on performance analysis of the gas-lubricated bearing in optical lithography
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