The effect of the recess shape on performance analysis of the gas-lubricated bearing in optical lithography
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials
Reference11 articles.
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3. The effect of inertia in lubrication flow including entrance and initial conditions;Tichy;ASME J Appl Mech,1985
4. Pressure drop due to inertia forces in step bearings;Constantinescu;ASME J Lubricated Technol,1976
5. The effect of lubricant inertia near the leading edge of a plane slide bearing;Buckholz;ASME J Tribol,1987
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