Author:
Eckstein W.,Scherzer B. M. U.,Verbeek H.
Cited by
19 articles.
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1. Sputtering of thin films by 100 keV Ar+ ions;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1985-05
2. Energy dependence of the ion-induced sputtering yields of monatomic solids;Atomic Data and Nuclear Data Tables;1984-07
3. Sputtering yield measurements;Topics in Applied Physics;1981
4. The sputtering mechanism for low-energy light ions;Applied Physics;1979-04
5. Sputtering yields of boron bombarded by light ions;Journal of Applied Physics;1978-12