Development of large-scale stacked-type electrostatic actuators for use as artificial muscles
Author:
Publisher
Informa UK Limited
Subject
Computer Science Applications,Hardware and Architecture,Human-Computer Interaction,Software,Control and Systems Engineering
Link
http://www.tandfonline.com/doi/pdf/10.1080/01691864.2013.867289
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1. A MEMS micromirror driven by electrostatic force
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4. An All-Metal Micro-Relay With Bulk Foil Pt–Rh Contacts for High-Power RF Applications
5. Design, fabrication, and testing of a 3-DOF HARM micromanipulator on (111) silicon substrate
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