A hybrid-type electrostatically driven microgripper with an integrated vacuum tool-Reference-Cited by-同舟云学术

A hybrid-type electrostatically driven microgripper with an integrated vacuum tool

Published:2010-03 Issue:2 Volume:158 Page:320-327
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Chen Tao,Sun Lining,Chen Liguo,Rong Weibin,Li Xinxin

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. Overview of microgrippers and design of a micromanipulation station based on a MMOC microgripper;Agnus,2005

2. Development of microgripper technology;Zhang;Optics Precision Eng.,2000

3. Polysilicon microgripper;Kim;Sens. Actuator A Phys.,1992

4. Electrostatically driven microgripper;Volland;Microelectron. Eng.,2002

5. Fabrication process analysis for electrostatically actuated microgripper based on silicon bulk micromachining;Li;Optics Precision Eng.,2003

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