Design, fabrication, and testing of a 3-DOF HARM micromanipulator on (111) silicon substrate-Reference-Cited by-同舟云学术

Design, fabrication, and testing of a 3-DOF HARM micromanipulator on (111) silicon substrate

Published:2006-01 Issue:2 Volume:125 Page:438-445
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Chang Heng-Chung,Tsai Julius Ming-Lin,Tsai Hsin-Chang,Fang Weileun

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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4. Electrostatically driven microgripper;Volland;Microelectr. Eng.,2002

5. Hexsil tweezers for teleoperated micro-assembly;Howe,1997

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