Self-matching plasma sources using 2.45 GHz solid-state generators: microwave design and operating performance
Author:
Affiliation:
1. Sairem SAS, Neyron, France
2. Institute for Applied Laser, Photonics and Surface Technologies, Bern University of Applied Sciences, Biel-Bienne, Switzerland
Funder
CTI
PAUD
Publisher
Informa UK Limited
Subject
Electrical and Electronic Engineering,Metals and Alloys,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Link
https://www.tandfonline.com/doi/pdf/10.1080/08327823.2017.1388338
Reference43 articles.
1. Electron cyclotron resonance microwave discharges for etching and thin‐film deposition
2. Diamond Chemical Vapor Deposition: Gas Compositions and film Properties
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