Electrodes for ferroelectric thin films
Author:
Affiliation:
1. a Department of Materials Science and Engineering , North Carolina State University , Raleigh, North Carolina, 27695, USA
2. b MCNC, Center for Microelectronic Systems Technology , Research Triangle Park, North Carolina, 27709-2889, USA
Publisher
Informa UK Limited
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials
Link
https://www.tandfonline.com/doi/pdf/10.1080/10584589308216687
Reference22 articles.
1. Presented at the 4th International Symposium on Integrated Ferroelectrics;Bernstein S. D.,1992
2. Bottom electrodes for integrated Pb(Zr, Ti)O3 films
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4. Hillock Growth and Stress Relief in Sputtered Au Films
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