Bottom electrodes for integrated Pb(Zr, Ti)O3 films-Reference-Cited by-同舟云学术

Bottom electrodes for integrated Pb(Zr, Ti)O3 films

Published:1992-11 Issue:1-4 Volume:2 Page:311-325
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Hren Philip D.¹,Rou S. H.¹,Al-Shareef H. N.¹,Ameen M. S.²,Auciello O.³,Kingon A. I.¹

Affiliation:

1. a Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC

2. b Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC,Materials Research Corporation, Orangeburg, NY

3. c Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC,Also Microelectronics Center of North Carolina, Research Triangle Park, NC

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584589208215751

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