Influence of platinum-based electrodes on the microstructure of sol-gel and MOD prepared lead zirconate titanate films
Author:
Affiliation:
1. a Philips Research Laboratories , P.O. Box 80,000, Eindhoven, The Netherlands
2. b Philips Gmbh Forschungslaboratorium Aachen , Aachen, Germany
Publisher
Informa UK Limited
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials
Link
https://www.tandfonline.com/doi/pdf/10.1080/10584589308216719
Reference13 articles.
1. Ferroelectric Memories
2. Ferroelectric thin films for electronic applications
3. Ferroelectric memories
4. Bottom electrodes for integrated Pb(Zr, Ti)O3 films
5. Investigation of Pt Bottom Electrodes for "In-Situ" Deposited Pb(Zr,Ti)O3 (PZT) thin Films
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