High resolution micro-positioning of a silicon cantilever using sputtered PZT films-Reference-Cited by-同舟云学术

High resolution micro-positioning of a silicon cantilever using sputtered PZT films

Published:1997-09 Issue:1-4 Volume:17 Page:309-318
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Jenkins D.F. L.¹,Cunningham M. J.¹,Velu G.¹²,Remiens D.¹

Affiliation:

1. a Division of Electrical Engineering , Manchester School of Engineering, University of Manchester Oxford Road , Manchester M13 9PL, England

2. b Université de Valenciennes, CRITT Maubeuge , Laboratoire des Matériaux Advancés Céramique, ZI Champ de l'Abesse, 59600 Maubeuge, France

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584589708013005

Reference13 articles.

1. Development of a force sensor for atomic force microscopy using piezoelectric thin films

2. Flexural plate-wave sensor: chemical vapor sensing and electrostrictive excitation

3. A dual frequency range integrated circuit accelerometer using capacitive and piezoelectric sensing techniques

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4. e31 piezoelectric constant measurement of lead zirconate titanate thin films;Journal of Applied Physics;1999-12-15

5. Caracterización de láminas delgadas ferroeléctricas por nanoidentación;Boletín de la Sociedad Española de Cerámica y Vidrio;1999-10-30