e31 piezoelectric constant measurement of lead zirconate titanate thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.371788
Reference28 articles.
1. Applications of PZT and Related Thin Films in Piezoelectric Microsensors
2. Design considerations of a piezoelectric-on-silicon microrobot
3. Integrated ferroelectric microelectromechanical systems (MEMS)
4. Electrical properties’ maxima in thin films of the lead zirconate–lead titanate solid solution system
5. Measurement of piezoelectric coefficients of ferroelectric thin films
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