In-situ deposition of PZT thin films by RF magnetron sputtering-Reference-Cited by-同舟云学术

In-situ deposition of PZT thin films by RF magnetron sputtering

Published:1995-02 Issue:1-4 Volume:7 Page:185-193
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Ansari P. H.¹²,Safari A.³

Affiliation:

1. a Department of Physics , Seton Hall University , S. Orange, NJ, 07079

2. c Center for Ceramic Research , Piscataway, NJ, 08855

3. b Department of Ceramic Engineering , Rutgers University , Piscataway, NJ, 08855

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584589508220231

Reference20 articles.

1. Ferroelectric memories

2. The high road toward an excellent nonvolatile memory

3. Ferroelectric memories

4. Processing and characterization of sol-gel derived very thin film ferroelectric capacitors

5. Process optimization and characterization of device worthy sol-gel based PZT for ferroelectric memories

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