Residual Stress Analysis of Pt Bottom Electrodes on ZrO2/SiO2/Si and SiO2/Si Substrates for Pb(ZrTi)O3Thick Films-Reference-Cited by-同舟云学术

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Residual Stress Analysis of Pt Bottom Electrodes on ZrO2/SiO2/Si and SiO2/Si Substrates for Pb(ZrTi)O3Thick Films

Published:2000-05-15 Issue:Part 1, No. 5A Volume:39 Page:2705-2709
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Jeon Yongbae,Kim Dong Goo,No Kwangsoo,Kim Seong-Jin,Chung Jaewoo

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 23 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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4. Fabrication of multilayer Pb(Zr,Ti)O3thin film by sputtering deposition for MEMS actuator applications;Japanese Journal of Applied Physics;2015-09-08

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