Infrared spectroscopy of hydrogenated and chlorinated amorphous silicon
Author:
Affiliation:
1. a Laboratoire de Physique des Solides , C.N.R.S. , 1 place A. Briand, Meudon Principal, 92195 , France
Publisher
Informa UK Limited
Subject
General Physics and Astronomy,General Chemical Engineering
Link
https://www.tandfonline.com/doi/pdf/10.1080/13642818608240664
Reference16 articles.
1. Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering
2. Optical and electrical properties of chlorinated and hydrogenated amorphous silicon prepared by glow discharge
3. Glow discharge deposition of chlorinated and hydrogenated amorphous silicon films from SiCl4SiH4
4. 291. The infrared spectra of the methylsilyl halides and related compounds
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Investigation of physical and electrical properties of a suboxide layer at Si/Si-hexafluoride interface;Scientific Reports;2024-06-03
2. Effect of downsizing and metallization on switching performance of ultrathin hafnium oxide memory cells;Materials Science in Semiconductor Processing;2023-05
3. Fast deposition of microcrystalline Si films from SiH2Cl2 using a high-density microwave plasma source for Si thin-film solar cells;Solar Energy Materials and Solar Cells;2010-03
4. New diagnostic method for monitoring plasma reactor walls: Multiple total internal reflection Fourier transform infrared surface probe;Review of Scientific Instruments;2001-08
5. Effects of SiH[sub 2]Cl[sub 2] on the Deposition and Properties of Amorphous and Microcrystalline Silicon Fabricated from Very High Frequency Glow Discharges;Journal of The Electrochemical Society;2000
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3