Effect of defects on Q factors of single-crystal diamond MEMS resonators
Author:
Affiliation:
1. Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, Japan
Funder
JSPS KAKENHI
a Grant-in-Aid for JSPS Research Fellows
Tsukuba Global Innovation Promotion Agency and Nanotechnology Platform projects
Publisher
Informa UK Limited
Subject
General Medicine
Link
https://www.tandfonline.com/doi/pdf/10.1080/26941112.2023.2221280
Reference34 articles.
1. Single Crystal Diamond Micromechanical and Nanomechanical Resonators
2. Progress in semiconductor diamond photodetectors and MEMS sensors;Liao M.;Funct Diam,2021
3. Single-crystal diamond microelectromechanical resonator integrated with a magneto-strictive galfenol film for magnetic sensing
4. Single-crystal diamond nanomechanical resonators with quality factors exceeding one million
5. Ion-Beam-Assisted Lift-Off Technique for Three-Dimensional Micromachining of Freestanding Single-Crystal Diamond
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