EUV-induced hydrogen plasma and particle release-Reference-Cited by-同舟云学术

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EUV-induced hydrogen plasma and particle release

Published:2022-03-28 Issue:5-6 Volume:177 Page:486-512
ISSN:1042-0150
Container-title:Radiation Effects and Defects in Solids
language:en
Short-container-title:Radiation Effects and Defects in Solids

Author:

van de Kerkhof Mark¹²^ORCID,Yakunin Andrei M.¹,Kvon Vladimir¹,Nikipelov Andrey¹,Astakhov Dmitry³⁴,Krainov Pavel⁴⁵,Banine Vadim¹²

Affiliation:

1. ASML Netherlands B.V., Veldhoven, The Netherlands

2. Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands

3. ISTEQ B.V., Eindhoven, The Netherlands

4. Institute for Spectroscopy of the Russian Academy of Sciences, Moscow, Russia

5. Moscow Institute of Physics and Technology, Moscow, Russia

Publisher

Informa UK Limited

Subject

Condensed Matter Physics,General Materials Science,Nuclear and High Energy Physics,Radiation

Link

https://www.tandfonline.com/doi/pdf/10.1080/10420150.2022.2048657

Reference89 articles.

1. Lithography for now and the future

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1. Science challenges and research opportunities for plasma applications in microelectronics;Journal of Vacuum Science & Technology B;2024-06-03

2. Particle mobilization by EUV-induced plasma and fast electrons;Optical and EUV Nanolithography XXXVII;2024-04-10

3. Advanced EUV patterning of 2D TMDs for CMOS integration;Novel Patterning Technologies 2024;2024-04-09

4. Real-time in situ monitoring of dust particle growth in a low-pressure nanodusty plasma based on laser-induced photodetachment;Applied Physics Letters;2024-02-26

5. From Jekyll to Hyde and Beyond: Hydrogen’s Multifaceted Role in Passivation, H-Induced Breakdown, and Charging of Amorphous Silicon Nitride;The Journal of Physical Chemistry Letters;2024-01-18

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