Effects of heavy-ion irradiation on the electrical properties of rf-sputtered HfO2thin films for advanced CMOS devices
Author:
Publisher
Informa UK Limited
Subject
Condensed Matter Physics,General Materials Science,Nuclear and High Energy Physics,Radiation
Link
http://www.tandfonline.com/doi/pdf/10.1080/10420150.2011.637037
Reference29 articles.
1. Defect generation in high κ gate dielectric stacks under electrical stress: the impact of hydrogen
2. Ultrathin high-K metal oxides on silicon: processing, characterization and integration issues
3. Study of electrical and microstructure properties of high dielectric hafnium oxide thin film for MOS devices
4. Improved thermal stability of nitrogen annealed sputtered hafnium oxide thin films for VLSI technology
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Charge trapping effect in HfO2-based high-k gate dielectric stacks after heavy ion irradiation: The role of oxygen vacancy;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-11
2. Co-60 gamma irradiation influences on device characteristics of n-SnO2/p-Si heterojunction diodes;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-04
3. Co-60 gamma irradiation influences on physical, chemical and electrical characteristics of HfO2/Si thin films;Radiation Physics and Chemistry;2018-09
4. Co-60 gamma irradiation effects on electrical characteristics of HfO 2 MOSFETs and specification of basic radiation- induced degradation mechanism;Radiation Physics and Chemistry;2018-08
5. Ion induced intermixing and consequent effects on the leakage currents in HfO2/SiO2/Si systems;Applied Physics A;2017-04-04
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3