Quasi-minimum mean square error run-to-run controller for dynamic models
Author:
Publisher
Informa UK Limited
Subject
Industrial and Manufacturing Engineering
Link
http://www.tandfonline.com/doi/pdf/10.1080/0740817X.2013.803643
Reference20 articles.
1. The Analysis of Closed-Loop Dynamic-Stochastic Systems
2. Supervisory run-to-run control of polysilicon gate etch using in situ ellipsometry
3. Integration of Statistical and Engineering Process Control in a Continuous Polymerization Process
4. Age-based double EWMA controller and its application to CMP processes
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