Nanoindentation characteristics of nanocrystalline tungsten via atomistic simulation-Reference-Cited by-同舟云学术

Nanoindentation characteristics of nanocrystalline tungsten via atomistic simulation

Published:2023-02-03 Issue:8 Volume:103 Page:749-767
ISSN:1478-6435
Container-title:Philosophical Magazine
language:en
Short-container-title:Philosophical Magazine

Author:

Hu Yiqun¹,Xu Jianfei¹,Su Lei¹,Liu Xiuming¹,Zhang Yuhang¹,Ding Suhang¹,Wang Rong²,Xia Re¹

Affiliation:

1. Key Laboratory of Hydraulic Machinery Transients (Wuhan University), Ministry of Education, Wuhan, People’s Republic of China

2. Defense Innovation Institute, Academy of Military Sciences, Beijing, People’s Republic of China

Funder

National Natural Science Foundation of China

Fundamental Research Funds for the Central Universities

Publisher

Informa UK Limited

Subject

Condensed Matter Physics

Link

https://www.tandfonline.com/doi/pdf/10.1080/14786435.2023.2173328

Reference63 articles.

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3. M. Drynan J, K. Fukui, M. Hamada, et al., Shared tungsten structures for FEOL/BEOL compatibility in logic-friendly merged DRAM[C]//International Electron Devices Meeting 1998. Technical Digest (Cat. No. 98CH36217). IEEE, 1998: 849-852.

4. Open-cell tungsten nanofoams: Chloride ion induced structure modification and mechanical behavior

5. Density functional theory study on the reducing agents for atomic layer deposition of tungsten using tungsten chloride precursor

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