SISO run-to-run feedback controller using triple EWMA smoothing for semiconductor manufacturing processes-Reference-Cited by-同舟云学术

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SISO run-to-run feedback controller using triple EWMA smoothing for semiconductor manufacturing processes

Published:2002-01 Issue:13 Volume:40 Page:3093-3120
ISSN:0020-7543
Container-title:International Journal of Production Research
language:en
Short-container-title:International Journal of Production Research

Author:

Fan Shu-Kai S.,Jiang Bernard C.,Jen Chih-Hung,Wang Chien-Chih

Publisher

Informa UK Limited

Subject

Industrial and Manufacturing Engineering,Management Science and Operations Research,Strategy and Management

Link

http://www.tandfonline.com/doi/pdf/10.1080/00207540210141652

Reference32 articles.

1. Extensions and performance/robustness tradeoffs of the EWMA run-to-run controller by using the internal model control structure

2. On self tuning regulators

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