Development of Localized Plasma Etching System for Failure Analyses in Semiconductor Devices
Author:
Publisher
The Vacuum Society of Japan
Subject
Spectroscopy,Surfaces and Interfaces,Instrumentation,General Materials Science
Reference2 articles.
1. 1) K. Nikawa: LSI failure analysis, (Kogyo Chosakai Publishing, Inc., Tokyo, 2007) p. 57. [in Japanese].
2. 2) K. Nakamae: LSI Testing Handbook, (the Institute of LSI Testing), (Ohmsha, Ltd., Tokyo, 2008) p. 334. [in Japanese].
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