Author:
MORISHIGE Fumiya,OTANI Kazuki,KASAI Satoshi,KAWABATA Keishi,OKAMOTO Keishi
Publisher
The Vacuum Society of Japan
Subject
Spectroscopy,Surfaces and Interfaces,Instrumentation,General Materials Science
Reference6 articles.
1. 1) H. Kobayashi: Sputter Hakumaku —kiso to ouyou— (The Nikkan Kogyo Shimbun, LTD., Tokyo, 2001) p. 3 [in Japanese].
2. 3) H. Kobayashi: Sputter Hakumaku —kiso to ouyou— (The Nikkan Kogyo Shimbun, LTD., Tokyo, 2001) p. 78 [in Japanese].
3. Characteristics of Substrate Current in Magnetron Sputtering of Nickel with Multipolar Magnetic Plasma Confinement Assisted by Inductively Coupled Plasma
4. 5) Y. Muraoka, R. Eboshi, S. Kurokawa, A. Tachibana, Y. Hasui and K. Kawabata: J. Vac. Soc. Jpn., 51 (2008) 408.
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