Angular distributions of sputtered particles-Reference-Cited by-同舟云学术

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Angular distributions of sputtered particles

Published:1986-05 Issue:3 Volume:4 Page:1218-1221
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Baxter J. P.,Schick G. A.,Singh J.,Kobrin P. H.,Winograd N.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.573401

Cited by 38 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Etching resistance and etching behavior of h-BN textured ceramics under Xe plasma condition;Ceramics International;2021-12

2. Fundamentals;Atomic Layer Processing;2021-04-28

3. Angular Distribution of Sputtered Particles from Ternary Alloy Fe71.9Cr5.6Al22.5 under Kr+ Bombardment at Normal Incidence;Acta Physica Polonica A;2019-03

4. Relative sputtering rates of oxides and fluorides of aluminum and yttrium;Surface and Coatings Technology;2017-01

5. Angular Distribution of Molecules Sputtered by Gas Cluster Ion Beams and Implications for Secondary Neutral Mass Spectrometry;The Journal of Physical Chemistry C;2016-11-02

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