Electron cyclotron resonance plasma assisted pulsed laser deposition for compound host film synthesis andin situdoping
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.2186653
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Spectroscopic studies of the plasma for the preparation of Al-N co-doped ZnO films;Spectrochimica Acta Part B: Atomic Spectroscopy;2017-05
2. Formation of diatomic molecular radicals in reactive nitrogen-carbon plasma generated by electron cyclotron resonance discharge and pulsed laser ablation;Physics of Plasmas;2014-04
3. The particle-in-cell simulation and Monte Carlo collision simulation of the interaction between electrons and microwave in electron cyclotron resonance discharge;Acta Physica Sinica;2009
4. Simulation of electron distribution features in the ionization process of an electron cyclotron resonance discharge;Physics of Plasmas;2007-11
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