Discharge characteristics for magnetron sputtering of Al in Ar and Ar/O2 mixtures
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Published:1980-05
Issue:3
Volume:17
Page:743-751
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Maniv S.,Westwood W. D.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
133 articles.
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