Ion milling (ion beam etching), 1975–1978: A bibliography
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Published:1979-07
Issue:4
Volume:16
Page:1051-1071
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Hawkins Donald T.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
16 articles.
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