The deposition and microstructure of broad beam, ion sputtered titanium nitride coatings
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference32 articles.
1. Material selection for hard coatings
2. Cross‐sectional transmission electron microscopy of the interfaces between physical vapor deposited TiNx coatings and steel substrates
3. Ion beam modification of TiN films during vapor deposition
4. Tribological behaviour of TiN Films deposited by high energy ion-beam-assisted deposition
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Photocatalytic activity of titania layer prepared by oxidizing titanium compounds on titanium plate surface;Applied Catalysis B: Environmental;2012-10
2. Texture in multilayer metallization structures;Journal of Applied Physics;1994-09
3. The deposition of electrically conductive films as a measure to improve the electrical discharge machining truing behavior of metal-bonded c-BN grinding wheels;Surface and Coatings Technology;1993-12
4. Direct plasma beam deposition of TiNx layers with an r.f. plasma beam source;Surface and Coatings Technology;1993-10
5. Ion-Beam-Assisted Deposition of TiN Thin Films;Japanese Journal of Applied Physics;1993-08-15
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