Electron projection lithography tool development status-Reference-Cited by-同舟云学术

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Electron projection lithography tool development status

Published:2002 Issue:6 Volume:20 Page:2622
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Miura Takaharu

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Research on platinum film resistance temperature sensing method;Eighth International Conference on Electronic Technology and Information Science (ICETIS 2023);2023-06-20

2. Status of UV Imprint Lithography for Nanoscale Manufacturing;Reference Module in Materials Science and Materials Engineering;2017

3. Study to Transfer 0.11μm DRAM ArF Process to KrF Process in Litho;ECS Transactions;2011-03-21

4. Status of UV Imprint Lithography for Nanoscale Manufacturing;Comprehensive Nanoscience and Technology;2011

5. Nikon EPL tool: the latest development status and results;SPIE Proceedings;2005-05-06

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