Status of UV Imprint Lithography for Nanoscale Manufacturing

Author:

Singh T.,Sreenivasan S.V.,Choi J.,Schumaker P.,Xu F.

Publisher

Elsevier

Reference106 articles.

1. Nanoscale manufacturing enabled by imprint lithography;Sreenivasan;MRS Bulletin,2008

2. 2D photonic crystal patterning for high volume LED manufacturing;Hershey;Proceedings of SPIE: Microlithography,2006

3. Schmid G., Doyle G., Miller M., Resnick D., 2007. Fabrication of dense sub-20 nm pillar arrays on fused silica imprint templates. In: Presented at the EIPBN Conference, June 2007, Denver, CO, USA.

4. International Technology Roadmap for Semiconductors. Available at: http://www.itrs.net

5. Full-field imprinting of sub-40-nm patterns;Yeo;Proceedings of SPIE: Advanced Lithography, Emerging Lithographic Technologies XII,2008

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